Equipment for temperature measurements of e-beam lithograph.
Student: Petr Stanek
Supervisor: Mgr. Frantisek Matejka
This technical project deals with problems concerning temperature measurements of selected parts of an e-beam lithograph. The main goal is a design and a practical realization of a temperature measurement circuitry. The circuit is based on a processor-controlled multiplexer (six thermocouple-measured points at the same time) and a METEX multimeter connected to a PC through a serial port. The measurement equipments will be used for temperature drift mapping of selected parts of an e-beam lithograph, which plays an important role in the production cycle and the eventual further thermo stabilisation.
