A callibration process of the EBL exposition field
Student: Ladislav Tuska
Supervisor: Ing. Vladimir Kolarik, PhD.
This bachelor work is engaged in electron-beam lithography, which is used to generate geometrical patterns
with submicron details. Geometrical precision of prepared structures is mainly affected by deflection lens
- its geometrical and electrical precision and stability. High-precision exposition needs a calibration process,
which consists of testing structure exposition, deviation measurements, calibration calculations, and
second (verifying) exposition.
This bachelor work falls into the grant GAČR - S2065014 "Electron-beam lithography for submicron
relief diffractive sttructures".
Figure: Merasured geometrical distortion of the rectangular exposition field.
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