Thermoelectric sensors Mo-Ni and Mo-Pt
Student: Karel Dokulil
Supervisor: Ing. Vladimir Kolarik, PhD.
This bachelor work deals with a design and prototyping of thermocouple sensors in a battery-like arrangement, which is supposed to present a large range of output thermal voltage. The structure was designed using ASBEST language. The prototypes were realized using thin-film technology and electron-beam lithography. Two different structures were designed, both of them for molybdenum-nickel and molybdenum-platinum couple of metals.
The bachelor work falls within the frame of the grant GACR 102/00/0939 "Integrated intelligent micro-sensors and micro-systems".
Figures: A detail of final "RAW" structure (top), a detail of "FINE" structure after 1st lithography (bottom).
