Abstract   ---    Optical samples   ---    E-beam samples   ---    Description   ---    Details (in Czech)


Patterns for e-beam microscopy

Similar patterns were prepared for use in the e-beam microscopy. Two different samples were finished: Platinum on Silicon and anizotropically etched Silicon.


rectangle, Si




grid 10u, Si




grid 5u, Si


rectangle, Pt




grid 10u, Pt




grid 30u, Si