Talystep - overview Talystep - detail Plasma Generator - overview Plasma Generator - detail
Equipment
Difraction Measurements Lithograph - overview Lithograph - vacuum chamber & control system Substrate Surface (Newton 'circles')
Equipment II (and Substrate Surface)
Round Substrate 4 inches Square Mask 1 (glass, Cr) Square Substrate 4 inches Square Mask 2 (glass, Cr)
Substrates and masks
3D Studio Optical Microscopy Temperature Monitoring Electro-Chemical Etching
Equipment III
Photos by F. Matejka, S. Kokrhel. Page by Vladimir Kolarik.